Systematic Investigation of Self-Heating Effect on CMOS Logic Transistors from 20 to 5 nm Technology Nodes by Experimental Thermoelectric Measurements and Finite Element Modeling

Liao, M.-H.M.-H.LiaoHsieh, C.-P.C.-P.HsiehLee, C.-C.C.-C.Lee2019-03-112019-03-112017https://scholars.lib.ntu.edu.tw/handle/123456789/404512[SDGs]SDG7Systematic Investigation of Self-Heating Effect on CMOS Logic Transistors from 20 to 5 nm Technology Nodes by Experimental Thermoelectric Measurements and Finite Element Modelingjournal article10.1109/TED.2016.26424042-s2.0-85009988975