Real-time fab-wise airborne molecular contaminant (AMC) monitoring system using multiple fourier transform infrared (FTIR) spectrometers in a semiconductor plant

Tsao Y.-C.Chang P.-E.Chen S.-Y.YAW-HUEI HWANG2022-03-312022-03-3120151680-8584https://www.scopus.com/inward/record.uri?eid=2-s2.0-84938338579&doi=10.4209%2faaqr.2014.08.0184&partnerID=40&md5=4f9226c71dd79e0c1ad34c8f46f67977https://scholars.lib.ntu.edu.tw/handle/123456789/603354[SDGs]SDG9Real-time fab-wise airborne molecular contaminant (AMC) monitoring system using multiple fourier transform infrared (FTIR) spectrometers in a semiconductor plantjournal article10.4209/aaqr.2014.08.01842-s2.0-84938338579