Projection Patterning With Exposure Mask

Kuen-Yu Tsai*Miin-Jang ChenSi-Chen Lee (National Taiwan University/Taiwan Semiconductor Manufacturing Company)KUEN-YU TSAI2019-10-312019-10-312017https://scholars.lib.ntu.edu.tw/handle/123456789/429889Projection Patterning With Exposure MaskpatentUnited States Patent 9,570,301