2006-08-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/696048摘要：利用銀或金奈米結構設計應用於奈米微影之光學頭，由於表面波模態或稱做表面電漿可以存在在金屬/介電質結構中，可以針對特定光波頻段增強或區域化電磁場在特定一小範圍之區域，在設計過程中將採用最佳化方法去調整結構的參數並改進光學頭之性能，設計之結構可用半導體製程技術製作並利用近場光學顯微儀量測，本計畫將可增進對金屬結構中之表面波導模態的物理特性之了解，並提供高性能奈米微影光學頭之設計過程。<br> Abstract: The optical head for nanolithography, designed by the silver or gold nanometer-scale structures, can enhance and localize the electromagnetic field for specific optical spectrum in the small spatial regions because there are the surface waveguide modes or called the surface plasmons in the metal/dielectric structures. The optimization methods can be applied in the design procedures to tune the parameters of the structures and to improve the performance of the optical head. The designed structures can be fabricated by solid state techniques and can be measured by using the near field scanning optical microscopy. This proposed research can give more physical understanding about surface waveguide modes in metallic structures and the design procedures of the high-performance optical head for nanolithography.奈米微影表面電漿光學頭最佳化近場光學nanolithographysurface plasmonoptical headoptimizationnear field應用於奈米微影之最佳化光學頭