Extraction of heat transfer macromodels for MEMS devices

Yu, C.-C.C.-C.YuYang, Y.-J.Y.-J.YangYAO-JOE YANG2020-01-132020-01-132003https://scholars.lib.ntu.edu.tw/handle/123456789/448558Extraction of heat transfer macromodels for MEMS devicesconference paper10.1109/SENSOR.2003.12171492-s2.0-2342656967https://www.scopus.com/inward/record.uri?eid=2-s2.0-2342656967&doi=10.1109%2fSENSOR.2003.1217149&partnerID=40&md5=b5bf5ef81d2f4c09fc2ad818027a5f4d