3-D micro surface profilometry employing novel Mirau-based lateral scanning interferometry

Chen, L.-C.L.-C.ChenLe, M.-T.M.-T.LeLin, Y.-S.Y.-S.LinLIANG-CHIA CHEN2020-01-132020-01-132014https://scholars.lib.ntu.edu.tw/handle/123456789/4478363-D micro surface profilometry employing novel Mirau-based lateral scanning interferometryjournal article10.1088/0957-0233/25/9/0940042-s2.0-84906277003https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906277003&doi=10.1088%2f0957-0233%2f25%2f9%2f094004&partnerID=40&md5=d1012e30d5b5cc3b931229ad5ec5401c