Jywe W.-Y.Jeng Y.-R.Teng Y.-F.Wang H.-S.Wu C.-H.Wen-Yuh Jywe2022-05-242022-05-242007https://www.scopus.com/inward/record.uri?eid=2-s2.0-49949093650&doi=10.1109%2fIECON.2007.4460035&partnerID=40&md5=7ba9a81e8a57d86b6497bc42d2fa6fc7https://scholars.lib.ntu.edu.tw/handle/123456789/611962In this paper, it was successfully developed a nano-measuring machine stage. It was used the features of a flexible structure to develop the nano-measuring machine stage. This stage includes two parts: one is a long range positioning X-Y stage and the other one is a four degrees-of-freedomicro-range stage. The flexible structure of the four degrees-of-freedom micro-range stage was included two kinds of an arc flexible body and a new two degrees-of-freedom flexible body. The micro-range stage was designed to compensate the moving errors such as vertical straightness error, pitch error and roll errors and its all moving range is 20mm × 20mm × 11μm. Precision feedback is provided by the six degrees-of-freedom measuring system with integrating the three plane mirror interferometers and a two degrees-of-freedom angular sensor. ?2007 IEEE.Annual conferenceFlexible bodiesLong rangeMeasuring systemsMoving rangeStraightness errorX-Y stageElectronics industryErrorsFlexible structuresIndustrial electronicsMeasurementsNanosensorsPrecision engineeringStages[SDGs]SDG16conference paper10.1109/IECON.2007.44600352-s2.0-49949093650