Aspect-ratio-dependent ultra-low reflection and luminescence of dry-etched Si nanopillars on Si substrate

Pai, Y.-H.Y.-H.PaiMeng, F.-S.F.-S.MengLin, C.-J.C.-J.LinKuo, H.-C.H.-C.KuoHsu, S.-H.S.-H.HsuChang, Y.-C.Y.-C.ChangGONG-RU LINLin, Chun-JungChun-JungLin2020-06-112020-06-112009https://scholars.lib.ntu.edu.tw/handle/123456789/500273Aspect-ratio-dependent ultra-low reflection and luminescence of dry-etched Si nanopillars on Si substratejournal article10.1088/0957-4484/20/3/0353032-s2.0-58149260306https://www.scopus.com/inward/record.uri?eid=2-s2.0-58149260306&doi=10.1088%2f0957-4484%2f20%2f3%2f035303&partnerID=40&md5=fe7e59d3bbffe1b18b8925eb8c098fb4