Anomaly detection for semiconductor tools using stacked autoencoder learning

Liao, D.-Y.D.-Y.LiaoChen, C.-Y.C.-Y.ChenTsai, W.-P.W.-P.TsaiChen, H.-T.H.-T.ChenWu, Y.-T.Y.-T.WuSHI-CHUNG CHANG2020-06-112020-06-112019https://scholars.lib.ntu.edu.tw/handle/123456789/499231[SDGs]SDG9Anomaly detection for semiconductor tools using stacked autoencoder learningconference paper10.1109/ISSM.2018.86511792-s2.0-85063192206https://www.scopus.com/inward/record.uri?eid=2-s2.0-85063192206&doi=10.1109%2fISSM.2018.8651179&partnerID=40&md5=b040324624f4fa28440bcc6caa7a4e08