Wang F.-C.Tsai Y.-C.Wu R.-C.Yen J.-Y.2019-07-032019-07-032013https://www.scopus.com/inward/record.uri?eid=2-s2.0-84888601766&partnerID=40&md5=9b31fdf0383b443d71a663c0bb412ea6https://scholars.lib.ntu.edu.tw/handle/123456789/412601Precision robust control for a three dimensional PZT stageconference paper2-s2.0-84888601766