Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching

Mendoza-Galván, A.A.Mendoza-GalvánJärrendahl, K.K.JärrendahlArwin, H.H.ArwinHuang, Y.-F.Y.-F.HuangChen, L.-C.L.-C.ChenChen, K.-H.K.-H.Chen2020-06-182020-06-1820091559128Xhttps://scholars.lib.ntu.edu.tw/handle/123456789/503337Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etchingjournal article10.1364/AO.48.004996