The modeling and control of the cluster tool in semiconductor fabrication

Dept. of Mech. Eng., National Taiwan Univ.Huang, Han-PangHan-PangHuangWang, Che-LungChe-LungWang2007-04-192018-06-282007-04-192018-06-282001http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021243application/pdf761158 bytesapplication/pdfen-USThe modeling and control of the cluster tool in semiconductor fabricationjournal article10.1109/ROBOT.2001.932874http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021243/1/00932874.pdf