Integrated 1x4 wavelength-selective switch with on-chip MEMS micromirrors

Chi, Chao-HsiChao-HsiChiJUI-CHE TSAILee, Ming-Chang M.Ming-Chang M.LeeHah, DooyoungDooyoungHahWu, Ming C.Ming C.Wu2018-09-102018-09-10200621622701https://www.scopus.com/inward/record.uri?eid=2-s2.0-84899531592&partnerID=40&md5=04361e8c24f3188641f05b6bb28aca4bhttp://scholars.lib.ntu.edu.tw/handle/123456789/323852A monolithic 1x4 wavelength-selective switch is realized by integrating silicon planar lightwave circuits and MEMS micromirrors on silicon-on-insulator (1.4x2 cm2) for CWDM networks with 20-nm spacing. © 2005 Optical Society of America.Microelectromechanical devices; Quantum electronics; CWDM networks; Micro mirror; On chips; Planar light-wave circuits; Wavelength-selective switches; MEMSIntegrated 1x4 wavelength-selective switch with on-chip MEMS micromirrorsconference paper2-s2.0-84899531592