CHEE-WEE LIUYu, C.-Y.C.-Y.YuChen, T.C.T.C.ChenLee, M.H.M.H.LeeHuang, S.-H.S.-H.HuangLee, L.S.L.S.LeeCHEE-WEE LIU2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-14844297748&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/309376Electrical and optical reliability improvement of HfO<inf>2</inf> gate dielectric by deuterium and hydrogen incorporationconference paper