Liu C.-H.Jywe W.-Y.Jeng Y.-R.Hsu T.-H.Li Y.-t.Wen-Yuh Jywe2022-05-242022-05-242010https://www.scopus.com/inward/record.uri?eid=2-s2.0-77951297948&doi=10.1016%2fj.precisioneng.2010.01.003&partnerID=40&md5=d2880117bc4bf23b95f322a25c09f90chttps://scholars.lib.ntu.edu.tw/handle/123456789/611938In this paper, a Dual-Axis Long-Traveling Nano-Positioning Stage (DALTNPS) is presented. In order to extend the traveling and increase the accuracy, the two sorts of stages, a traditional ball-screw stage and a three-degrees-of-freedom (3-DOF) piezo-stage, were composed. The traditional ball-screw stage which is composed of two guide-ways and a ball-screw at each axis is a long-travel stage, and the 3-DOF piezo-stage, which is composed of three piezoelectric actuators and four translation-rotation mechanisms, is a high precision stage. In addition, a 3-DOF measuring system and a PID controller are composed of a 3-DOF closed-loop controller and applied to implement the DALTNPS. The measuring system which is composed of two laser interferometers and two plane mirrors is a 3-DOF optical measuring system. Thus, the position at the x and y axes and the rotation around the z axis can be obtained and they are the responses of DALTNPS. Finally, the experiment results evidence that the DALTNPS is characterized by long-travel, high linear accuracy, high rotation accuracy, high contouring accuracy and high motion speed. ? 2010 Elsevier Inc. All rights reserved.Ball-screwClosed loop controllersContouring accuracyDesign and controlDual axisHigh precision stageLaser interferometerLong-travelMeasuring systemsNano-positioningOptical measuring systemsPID controllersPlane mirrorsRotation accuracyRotation mechanismInterferometersLaser interferometryMeasurement theoryMirrorsPiezoelectric actuatorsProportional control systemsRotationSpheresjournal article10.1016/j.precisioneng.2010.01.0032-s2.0-77951297948