Chen, Y.-P.Y.-P.ChenChen, C.-H.C.-H.ChenChang, J.-H.J.-H.ChangChiu, H.-C.H.-C.ChiuChen, G.-Y.G.-Y.ChenChiang, C.-H.C.-H.ChiangChen, L.-S.L.-S.ChenTseng, C.-T.C.-T.TsengLee, C.-H.C.-H.LeeYen, J.-Y.J.-Y.YenLON A. WANGJIA-YUSH YEN2020-06-042020-06-042009https://scholars.lib.ntu.edu.tw/handle/123456789/497251Stitching periodic submicron fringes by utilizing step-and-align interference lithographyconference paper10.1116/1.32581522-s2.0-72849137288https://www.scopus.com/inward/record.uri?eid=2-s2.0-72849137288&doi=10.1116%2f1.3258152&partnerID=40&md5=007714ef4b43654e5601bde24a6dd391