Zefu ZhaoYun-Wen ChenYu-Rui ChenCHEE-WEE LIU2024-08-122024-08-122024https://scholars.lib.ntu.edu.tw/handle/123456789/720190Engineering Ferroelectric HZO With n<sup>+</sup>-Si/Ge Substrates Achieving High 2<i>P<sub>r</sub> </i>=84 <b>μ</b>C/cm<sup>2</sup> and Endurance >1E11journal article10.1109/access.2024.3402120