Design of void-based photonic crystal EUV mirror, supplementary zones-surrounded Fresnel lens, and EUV inspection system

Jia-Han Li*JIA-HAN LI2022-01-032022-01-032019http://140.127.232.76/file/20190516_jiahanli.pdfhttps://scholars.lib.ntu.edu.tw/handle/123456789/590834Design of void-based photonic crystal EUV mirror, supplementary zones-surrounded Fresnel lens, and EUV inspection systemconference paper