L. A. Wang,L. A. WangH. L. Chen,H. L. ChenC. H. Lin,C. H. LinLON A. WANG2018-09-102018-09-101998-01http://scholars.lib.ntu.edu.tw/handle/123456789/342849Fabrication of Phase Shifting Mask Patterns by Utilizing Top Surface Imaging Techniqueconference paper