Surface passivation of III-V compound semiconductors using atomic-layer-deposition-grown Al̃ 2Õ 3

Huang, MLMLHuangChang, YCYCChangChang, CHCHChangLee, YJYJLeeChang, PPChangKwo, JJKwoWu, TBTBWuMINGHWEI HONG2018-09-102018-09-102005http://scholars.lib.ntu.edu.tw/handle/123456789/315742Surface passivation of III-V compound semiconductors using atomic-layer-deposition-grown Al̃ 2Õ 3journal article