Development of a nano-positioning planar motion stage

Chung, T.-T.T.-T.ChungChu, C.-H.C.-H.ChuFan, K.-C.K.-C.FanYen, J.-Y.J.-Y.YenSzu, K.-I.K.-I.SzuJIA-YUSH YEN2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-77957802390&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/356045Development of a nano-positioning planar motion stageconference paper10.1109/ICMEE.2010.55585812-s2.0-77957802390