2007-01-012024-05-15https://scholars.lib.ntu.edu.tw/handle/123456789/664007摘要:本計畫欲開發一國內自主且合乎量產的次世代鑽石修整器製程技術,此製程的主要目的是在PCD鑽石碟上面加工出等高的微尖錐結構。計畫中規劃分三項主要的工作:(一)進行單一線徑線切割放電加工PCD的研究,探討其加工特性與較佳之加工參數。(二)以線切割放電加工之方式,先以粗線進行微結構雛形的粗加工,接著採用細線做精修至最後之微結構,此部分將研究細線之線切割放電加工PCD特性、製程之加工規劃與加工參數最佳化。(三)以具微結構之電極對PCD進行形雕放電加工,先以銅電極進行微結構雛形的粗加工,接著採用PCD電極做精修加工出構陣列。此部分將研究銅電極與PCD電極之製作、銅電極形雕放電加工PCD、PCD電極對PCD材料之形雕放電精加工等。執行完後預期將瞭解線切割放電加工PCD鑽石之特性,作為選取較佳的製程參數的參考、掌握雙線的線切割放電加工特性以及形雕放電加工的方式製造鑽石碟的可行性。本計畫為研究獨特之製程技術,執行本計畫除了確實配合廠商之需求,使國內具研發與製造世界最先進的IC製程中鑽石修整器,提高市場之佔有率外,亦將使得台大有機會成為鑽石切削加工的一主要研究中心。<br> Abstract: This project is to develop a self-own, time saving and cost effective manufacturing technology to produce next generation diamond conditioner. The technology will generate the micro pyramid structure arrays of the same leveling at their tips on the PCD disk. This project includes three main tasks. (1) Study of the machining PCD by wire electrical discharge machining (Wire-EDM) using a conventional used diameter wire. The machining characteristics and better machining conditions will be investigated. (2) The approximate shape of the micro structure is machined by Wire-EDM using a large diameter wire. This is followed by finishing Wire-EDM using a small diameter wire until final micro structure is obtained. The works include study of the fishing Wire-EDM of PCD, process planning and optimization of machining conditions. (3) The desired micro structure arrays are machined by die sinking EDM using the electrode having the micro structure arrays. The copper electrode is taken first to rough machine PCD. The PCD electrode is then applied for finish machining. In this category, it is necessary to study the technology of manufacturing copper and electrode electrodes. Besides, die sinking EDM of PCD using copper electrode and PCD electrode, respectively will be investigated. In carrying out this project it is expected that the characteristics of Wire-EDM PCD will be understood more comprehensively, and hence better machining conditions can be selected. It will also provide us the basic knowledge of Wire-EDM PCD using the concept of roughing followed by finishing. In addition, the feasibility of die sinking EDM PCD can be verified. The manufacturing technology under development in this project is unique. Completion of this project would enable the cooperative company to have its own technology to manufacture the most advanced diamond conditioner in the world, and hence increases its market share. The Traditional and Nontraditional Processes Laboratory in the Department of Mechanical Engineering at Taiwan University which carries out the project also has a chance to become one of the main centers in diamond machining.鑽石修整器PCD鑽石碟製程技術diamond conditionerPCD diamond diskmanufacturing technology促進產學合作先導型研究計畫/工學院/次世代CMP鑽石碟製程技術之開發研究