Modeling and performance evaluation of a controlled IC fab using distributed colored timed Petri net

Dept. of Mech. Eng., National Taiwan Univ.Kuo, Chung-HsienChung-HsienKuoHuang, Han-PangHan-PangHuang2007-04-192018-06-282007-04-192018-06-282000-04http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021504application/pdf729605 bytesapplication/pdfen-USModeling and performance evaluation of a controlled IC fab using distributed colored timed Petri netjournal article10.1109/ROBOT.2000.846353http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021504/1/00846353.pdf