Localized corrosion effects and modifications of acidic and alkaline slurries on copper chemical mechanical polishing

Tsai, Tzu-HsuanTzu-HsuanTsaiYen, Shi-ChernShi-ChernYen2008-12-172018-06-282008-12-172018-06-282003http://ntur.lib.ntu.edu.tw//handle/246246/92347application/pdf531028 bytesapplication/pdfen-USLocalized corrosion effects and modifications of acidic and alkaline slurries on copper chemical mechanical polishingjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/92347/1/05.pdf