Data science framework for variable selection, metrology prediction, and process control in TFT-LCD manufacturing

CHIA-YEN LEETsai, T.-L.T.-L.Tsai2020-12-162020-12-162019https://www.scopus.com/inward/record.uri?eid=2-s2.0-85050872315&doi=10.1016%2fj.rcim.2018.07.013&partnerID=40&md5=e71db1c8960f584f96cdc051bc5fa3cbhttps://scholars.lib.ntu.edu.tw/handle/123456789/526186Data science framework for variable selection, metrology prediction, and process control in TFT-LCD manufacturingjournal article10.1016/j.rcim.2018.07.0132-s2.0-85050872315