2024-05-182024-05-1807213https://scholars.lib.ntu.edu.tw/handle/123456789/718345Si MOS DevicesUltra-thin Gate Oxide ProcessesNovel Si-based DevicesRapid Thermal Processing-RTPUniformity Analysis and Stress ControlSi MOS Solar Cell and Photo Sensors矽金氧半元件超薄閘極氧化層製程技術新型矽基元件快速熱機台及製程均勻度分析及應力控制矽金氧半太陽電池及光感應器