Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method

Yen-Min LeeJia-Han LiPhilip C. W. NgTing-Han PeiFu-Min WangKuen-Yu TsaiKUEN-YU TSAIJIA-HAN LI2018-09-102018-09-102009-11http://scholars.lib.ntu.edu.tw/handle/123456789/352127Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain methodconference paper10.1117/12.8371502-s2.0-77952062242