2001-08-012024-05-18https://scholars.lib.ntu.edu.tw/handle/123456789/705875摘要：傳統分析AT切面石英平板振動大都源自Mindlin板理論。但隨著無線通訊市場的崛起，石英元件的規格亦日趨嚴謹，且體積越縮越小，振盪頻率的設計分析亦趨複雜。近期，Lee提出新二維壓電平板振動分析理論，不僅考慮了壓電效應並包含電極面的質量效應。本計畫進一步針對矩形高頻石英振盪器進行理論與數值分析，可以用來分析彎曲振動等模態對厚度剪切基頻的影響。另一方面，利用有限元素法針對石英平板進行模擬，分析不同尺寸、電極面的效應。本計畫亦以RLC等效電路模擬相關試體並利用創新都普勒干涉儀(AVID)以單點量測位移的方式，瞭解相關的模態振形。進而得知傳統設計振盪器所選用的振動模態為何，與相對應的模態頻率值，並與有限元素法所得結果作比對。<br> Abstract: Due to the rapid growth of wireless communication technology and markets, the specifications of quartz oscillators are more and more strict recently. In this project, we studied the characteristics of rectangular high frequency AT-quartz resonators as well as the design details of the dimensions of a quartz plate. The theoretical analysis was based on the Lee’s approximated solutions of piezoelectric plate vibrations. Through the theoretical simulations, one can understand how the flexural and face-shear vibration modes affected the thickness shear mode. On the other hand, RLC equivalent circuit simulations and the AVID(Advanced Vibrometer Interferometer Device) were used to measure frequency responses and the displacement responses of the rectangular quartz plate. Through the measurement, one can obtain the vibration mode shapes of commercial quartz resonators and serve as an important basis for the design of high frequency quartz resonators.石英振盪器模態振形雷射都卜勒干涉quartz oscillatorvibration mode shapeAdvanced Vibrometer Interferometer Device