Effects of etching holes on complementary metal oxide semiconductor- microelectromechanical systems capacitive structure

Tu, W.-H.W.-H.TuChu, W.-C.W.-C.ChuLee, C.-K.C.-K.LeeChang, P.-Z.P.-Z.ChangCHIH-KUNG LEEPEI-ZEN CHANG2020-04-282020-04-282013https://scholars.lib.ntu.edu.tw/handle/123456789/486158Effects of etching holes on complementary metal oxide semiconductor- microelectromechanical systems capacitive structureconference paper10.1177/1045389X124499172-s2.0-84872732436https://www.scopus.com/inward/record.uri?eid=2-s2.0-84872732436&doi=10.1177%2f1045389X12449917&partnerID=40&md5=140cf3078a96a99c5c90c73cc355f668