Recent advances in optical MEMS devices and systems

Patterson, P.R.P.R.PattersonHah, D.D.HahLee, M.M.C.M.M.C.LeeTsai, J.C.J.C.TsaiWu, M.C.M.C.WuJUI-CHE TSAI2018-09-102018-09-102002http://www.scopus.com/inward/record.url?eid=2-s2.0-0036986557&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/298224[SDGs]SDG9Recent advances in optical MEMS devices and systemsconference paper10.1117/12.453712