STI Geometric Influence of a Recessed Surface on Array-type Arrangements of Nano-scaled Devices Strained by CESL and Ge-based Stressors

M. H.LiaoC. C. LeeC.-P. HsiehP.-C. HuangS.-W. Cheng2019-03-112019-03-112016https://scholars.lib.ntu.edu.tw/handle/123456789/404546STI Geometric Influence of a Recessed Surface on Array-type Arrangements of Nano-scaled Devices Strained by CESL and Ge-based Stressorsjournal article