Water-induced room-temperature oxidation of Si-H and -Si-Si- bonds in silicon oxide

Liao, W.-S.W.-S.LiaoSI-CHEN LEE2020-06-112020-06-111996https://scholars.lib.ntu.edu.tw/handle/123456789/498805[SDGs]SDG6Water-induced room-temperature oxidation of Si-H and -Si-Si- bonds in silicon oxidejournal article10.1063/1.3629152-s2.0-0001053614https://www.scopus.com/inward/record.uri?eid=2-s2.0-0001053614&doi=10.1063%2f1.362915&partnerID=40&md5=32656c229a1dad97e8f2042de5a7651e