Effect of metal buffer layer on surface acoustic wave in AlN/diamond structure

CHIA-CHI SUNGChiang, Y.-F.Y.-F.ChiangRo, R.R.RoLee, R.R.LeeWu, SeanSeanWu2020-01-172020-01-172010https://scholars.lib.ntu.edu.tw/handle/123456789/451115Effect of metal buffer layer on surface acoustic wave in AlN/diamond structureconference paper10.1080/00150193.2010.4849922-s2.0-79955697865https://www.scopus.com/inward/record.uri?eid=2-s2.0-79955697865&doi=10.1080%2f00150193.2010.484992&partnerID=40&md5=39359544dba009b4202224498ccb4589