Age-based double EWMA controller and its application to a CMP process

Chen, A.A.ChenGuo, R.-S.R.-S.Guo2019-05-132019-05-132000https://www.scopus.com/inward/record.uri?eid=2-s2.0-85056912945&partnerID=40&md5=7c2c22f2a70718d3cf151f4e8bead742https://scholars.lib.ntu.edu.tw/handle/123456789/407842Age-based double EWMA controller and its application to a CMP processbook part2-s2.0-85056912945