范光照Fan, Kuang-Chao臺灣大學:機械工程學研究所黃順洋Huang, Shun-YangShun-YangHuang2010-06-302018-06-282010-06-302018-06-282009U0001-1708200913502900http://ntur.lib.ntu.edu.tw//handle/246246/187087本研究利用共焦顯微鏡量測方式(Confocal microscopy)作為理論基礎，並配彩色共焦微術(Chromatic confocal microscopy)演算理論與雜訊消除技術，進行體三維輪廓重建(3D profile reconstruction)；使用三原色混成之白光光源，經過學系統後產生軸向色差，針對單一像素找出其對應的深度反應曲線(Depthesponse curve)，經由兩色之深度反應曲線進行比值對應深度之線性關係，最後得單張景深(Depth of focus)範圍內之影像，利用雷射干涉儀作為Z 軸校正源，可對影像上每一像素做比值對深度的運算，進而重建待測物表面輪廓研究開發出一套多波長共焦顯微探頭(chromatic confocal microscopicrobe)之技術，提供對微奈米三維結構進行量測。此多波長共焦探頭將由探頭光模組及訊號處理模組兩部份構成，探頭光機模組由LED 光源及光纖模組、準透鏡、分光鏡、繞射光學元件、顯微物鏡、濾光針孔、及三色CCD 等元件所成；訊號處理模組含輸入光強之自動功率控制電路及正規化訊號之處理電路。色CCD 可提供全域式各量測像素之RGB 波段聚焦訊號，各量測像素之輪廓度可由不同波長之聚焦訊號計算獲得，待測件之輪廓量測無需任何垂直掃描動，物件可將置於一線性移動台上進行平移式之面掃描，尺寸計算及視覺影像由C 負責顯示。針對一微米以上的階高形及三角形微結構可達到解析度為: 縱向.5μm、橫向1μm，量測準確度為: 縱向0.2μm、橫向0.2μm。A chromatic confocal microscopic profilometer for full-field three-dimensionalicro surface measurement was developed using innovative multi-wavelength lightorrelation. Micro/nano structures patterned on the substrate and fabricated by the2R (Roll-to-Roll) nanoimprint processes are usually having a smooth andow-reflective surface which is not easily measured by the existing optical orontacted methods. It was an extremely difficult task to achieve an effective 3-Drofile reconstruction on this kind of micro component by using a traditional confocalicroscope. In this paper, a multi-wavelength confocal measurement methodmploying the focusing cross correlation between three LED color (Red, Green andlue) lights was introduced to measure micro structures. A compact chromaticonfocal microscopic probe was developed by integrating a white light sourcebtained by mixing the LED light sources and a coaxial confocal optical configurationith a 3-chip CCD camera for individual light sensing. A curve-fitting functionetween the profile depth and the multi-color focusing correlation was established by system calibration with a reference to an accurate laser interferometer. To attest theeasurement performance, a calibrated reference target having micro-triangulartructures was fabricated and measured by the developed methodology. From analysisf the measurement results, it was confirmed that a standard deviation of 30 nm on theeight measurement can be achieved. The confocal profilometer can be effectivelymployed to the automatic optical inspection (AOI) task of the brightness n h a n c eme n t f i lms ( BE F ) f a b r i c a t e d b y t h e R 2R p r o c e s s e s .摘要............................................ Ibstract ....................................... I錄............................................ II目錄.......................................... IV目錄.......................................... VIII一章 緒論..................................... 1-1 研究動機.................................... 1二章 共焦量測原理與文獻回顧....................6-1 共焦量測原理................................ 6-2-1 文獻回顧.................................. 8-2-2 文獻探討.................................. 22三章 量測系統設計............................. 23-1 聚焦量測原理................................ 23-2-1 多波長聚焦原理............................ 25-2-2 量測系統分析.............................. 26-2-3 量測系統硬體架構與量測流程................ 28四章 演算法運用............................... 33-1 深度反應曲線................................ 33-1-1 正規化.................................... 34-1-2 高斯函數分佈.............................. 35-1-3 最小平方法擬合............................ 37-3-1 低通濾波.................................. 41-3-2 中值濾波.................................. 41-3-3 轉平面應用................................ 42五章 實驗結果................................. 46-1 RGB 分光情況與深度反應曲線.................. 46-2-1 單點多波長量測結果........................ 49-4-1 光柵片量測................................ 51-4-2 階高量測.................................. 53-4-3 間隙球量測................................ 53-7-1 振動中量測................................ 56-7-2 水平移動中量測............................ 58六章 結論與未來展望........................... 60-1 結論........................................ 60-2 未來展望.................................... 60考文獻........................................ 62錄A 相關元件設備規格.......................... 6529201346 bytesapplication/pdfen-US聚焦形貌三維輪廓重建多波長彩色共焦chromatic3D Profile reconstructionimageConfocalthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/187087/1/ntu-98-R96522723-1.pdf