Multiscale, hierarchical integration of soft polymer micro- and nanostructures into optical MEMS

Kurabayashi, K.K.KurabayashiHuang, N.-T.N.-T.HuangTung, Y.-C.Y.-C.TungNIEN-TSU HUANG2020-06-292020-06-292017https://scholars.lib.ntu.edu.tw/handle/123456789/506086https://doi.org/10.1201/b13892Multiscale, hierarchical integration of soft polymer micro- and nanostructures into optical MEMSbook part2-s2.0-85051754546https://www.scopus.com/inward/record.uri?eid=2-s2.0-85051754546&doi=10.1201%2fb13892&partnerID=40&md5=ab3e32741b6f5a4a63a1bf01a16efee5