A Gridless Approach to the Satisfiability of Self-Aligned Triple Patterning

Hsiao-Lei ChienMei-Yen ChiuJie-Hong R. JiangJIE-HONG JIANG江介宏2019-10-242019-10-2420172780070https://scholars.lib.ntu.edu.tw/handle/123456789/427573[SDGs]SDG9A Gridless Approach to the Satisfiability of Self-Aligned Triple Patterningjournal article10.1109/tcad.2017.27026492-s2.0-85029364499