Development of a Low-Cost Autofocusing Probe for Profile Measurement

Fan, K.C.K.C.FanChu, C.L.C.L.ChuMou, J. I.J. I.Mou2008-11-182018-06-282008-11-182018-06-282001http://ntur.lib.ntu.edu.tw//handle/246246/86551application/pdf356121 bytesapplication/pdfen-USDevelopment of a Low-Cost Autofocusing Probe for Profile Measurementjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86551/1/17.pdf