Liao, Y. S.Y. S.LiaoTsai, M. Y.M. Y.TsaiSung, J. C.J. C.SungPai, Y. L.Y. L.Pai2010-09-072018-06-282010-09-072018-06-282006http://ntur.lib.ntu.edu.tw//handle/246246/200187en-USSingle Diamond Dressing Characteristics of CMP Polyurethane Padjournal article