Micromachined 22 GHz PI filter by CMOS compatible ICP deep trench technology

SHEY-SHI LU2018-09-102018-09-102007http://www.scopus.com/inward/record.url?eid=2-s2.0-34047120832&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/332326[SDGs]SDG7Micromachined 22 GHz PI filter by CMOS compatible ICP deep trench technologyjournal article10.1049/el:20070437