A novel six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanism

Huang, Sheng-ChihSheng-ChihHuangHung Shao-KangChen Mei-YungLin Chih-HsienFu Li-ChenLI-CHEN FU2018-09-102018-09-102007http://www.scopus.com/inward/record.url?eid=2-s2.0-49949107922&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/332222[SDGs]SDG7A novel six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanismconference paper10.1109/IECON.2007.4460161