Silicon surface grating formation with high power UV laser

CHEE-WEE LIUChen, Cheng-YenCheng-YenChenChao, Chung-YenChung-YenChaoGurtler, SteffenSteffenGurtlerLiu, Chee-WeeChee-WeeLiuYang, C.C.C.C.YangCHEE-WEE LIU2018-09-102018-09-101999http://www.scopus.com/inward/record.url?eid=2-s2.0-0033329084&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350498Silicon surface grating formation with high power UV laserconference paper