Polycide contact interface to suppress squegging in micromechanical resoswitches

Lin, Y.Y.LinLiu, R.R.LiuLi, W.-C.W.-C.LiNguyen, C.T.-C.C.T.-C.NguyenWEI-CHANG LI2020-04-282020-04-282014https://scholars.lib.ntu.edu.tw/handle/123456789/486398Polycide contact interface to suppress squegging in micromechanical resoswitchesconference paper10.1109/MEMSYS.2014.67658812-s2.0-84898938239https://www.scopus.com/inward/record.uri?eid=2-s2.0-84898938239&doi=10.1109%2fMEMSYS.2014.6765881&partnerID=40&md5=67fdc10a7a6122950d63a086df72d209