Solid-immersion micromirror with enhanced angular deflection for silicon-based planar lightwave circuits

Chi, C.-H.C.-H.ChiTsai, J.-C.J.-C.TsaiHah, D.D.HahJeong, K.-H.K.-H.JeongWu, M.C.M.C.WuJUI-CHE TSAI2018-09-102018-09-102005http://www.scopus.com/inward/record.url?eid=2-s2.0-33749052517&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/316321Solid-immersion micromirror with enhanced angular deflection for silicon-based planar lightwave circuitsconference paper10.1109/OMEMS.2005.1540113