A PZT micropump with planar passive valves and its flow measurements

Hsu C.-J.Sheen H.-J2019-06-122019-06-1220099.78E+12https://www.scopus.com/inward/record.uri?eid=2-s2.0-77953859877&doi=10.1115%2fFEDSM2009-78250&partnerID=40&md5=701323a9c75976cf38019fd303deae01https://scholars.lib.ntu.edu.tw/handle/123456789/411013A PZT micropump with planar passive valves and its flow measurementsconference paper10.1115/FEDSM2009-782502-s2.0-77953859877