Distributed Performance Evaluation of a Controlled IC Fab

National Taiwan University Dept Ind EngnHuang, Han-PangHan-PangHuangKuo, C.H.C.H.KuoHuang, H.P.H.P.HuangKuo, Chung-HsienChung-HsienKuoHuangHanPangHuangHP2008-11-112018-06-282008-11-112018-06-282003http://ntur.lib.ntu.edu.tw//handle/246246/86217https://www.scopus.com/inward/record.uri?eid=2-s2.0-0442295568&doi=10.1109%2fTRA.2003.819720&partnerID=40&md5=cd330a8c87f605910d7d4df5260056a0application/pdf399592 bytesapplication/pdfen-US[SDGs]SDG8Distributed Performance Evaluation of a Controlled IC Fabjournal article10.1109/TRA.2003.8197202-s2.0-0442295568http://ntur.lib.ntu.edu.tw/bitstream/246246/86217/1/45.pdf