Fresnel zone plate manufacturability analysis for direct-write lithography by simulating focusing and patterning performance versus fabrication errors

Tsai, K.-Y.K.-Y.TsaiChen, S.-Y.S.-Y.ChenPei, T.-H.T.-H.PeiKUEN-YU TSAIJIA-HAN LI2020-01-172020-01-172010https://scholars.lib.ntu.edu.tw/handle/123456789/451477Fresnel zone plate manufacturability analysis for direct-write lithography by simulating focusing and patterning performance versus fabrication errorsjournal article10.1143/JJAP.49.06GD082-s2.0-77955339335https://www.scopus.com/inward/record.uri?eid=2-s2.0-77955339335&doi=10.1143%2fJJAP.49.06GD08&partnerID=40&md5=3c65ea15c621a437229477bccb035fb0