Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors

Su, G.-D.J.G.-D.J.SuToshiyoshi, H.H.ToshiyoshiWu, M.C.M.C.WuGUO-DUNG JOHN SU2018-09-102018-09-102001http://www.scopus.com/inward/record.url?eid=2-s2.0-0035362738&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/293462Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrorsjournal article10.1109/68.924038