Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam

S. Y. ChenK. Y. TsaiH. T. NgC. H. FanT. H. PeiC. H. KuanY. Y. ChenY. H. KuoC. J. WuJ. Y. YenYUNG-YAW CHEN2018-09-102018-09-102010-06http://scholars.lib.ntu.edu.tw/handle/123456789/359246Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithographyconference paper