A novel fabrication method for suspended high-aspect-ratio microstructures

Kuo, W.-C.W.-C.KuoYang, Y.-J.Y.-J.Yang2008-11-052018-06-282008-11-052018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/86000application/pdf2213269 bytesapplication/pdfen-USA novel fabrication method for suspended high-aspect-ratio microstructuresjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86000/1/07.pdf